EQUIPMENT RATES AND SUPERUSERS


Equipment

Local Hourly Rate

Local Staff Time

Min Hours

Max Hours

Other Academic
Rate

Other Academic Staff Time Rate

External Rate

External Staff Time Rate

Superuser

Angstrom Metals Deposition System

$35

$33.3

0.5

4

$42

$40

$105

$100

Matthew Yankowitz

Boyan Ivanov Penkov

AJA Sputter Metal Deposition System

$22

$33.3

0.5

4

$26.4

$40

$66

$100

Aida Colon

AJA Sputter Dielectric Deposition System

$25

$33.3

0.5

4

$30

$40

$75

$100

Aida Colon

Wet benches

$17

$33.3

0.5

3

$20.4

$40

$51

$100

Clean room Staff

Bal-Tec Critical Point Dryer

$17

$33.3

0.5

3

$20.4

$40

$51

$100

Steve Miller

Beamer

$25

$33.3

0.5

8

$30

$40

$75

$100

Steve Miller

KLA D-600 Profilometer

$17

$33.3

0.5

2

$20.4

$40

$51

$100

Caroline Yu

Cambridge NanoTech ALD

$33

$33.3

0.5

4

$39.6

$40

$99

$100

Shrestha Sajan

Diener Plasma Etch

$33

$33.3

0.5

4

$39.6

$40

$99

$100

Tim Olsen

Anatech Plasma Asher

$33

$33.3

0.5

4

$39.6

$40

$99

$100

Clean room Staff

Edwards Thermal Evaporator

$17

$33.3

0.5

4

$20.4

$40

$51

$100

Yuan Jia

Heidelberg (3um) Laser Writer

$28

$33.3

0.5

8

$33.6

$40

$84

$100

Aida Colon

Heidelberg DWL 66+ Laser Writer

$33

$33.3

0.5

10

$39.6

$40

$99

$100

Aida Colon

Gaurang Ravindra Bhatt

Litho Hoods (Spinners)

$17

$33.3

0.5

3

$20.4

$40

$51

$100

Clean room staff

Litho dirty spin station

15

$33.3

0.5

3

18

$40

$45

$100

Clean room staff

Nanobeam nB4

$55

$33.3

0.5

8

$66

$40

$165

$100

Cheng Tan En-Min Shih

FEI Nova Nano SEM and NPGS e beam writing

$25

$33.3

0.5

8

$30

$40

$75

$100

Joshua Robert Swann

Scott Dietrich

Oxford ICP RIE

$40

$33.3

0.5

4

$48

$40

$120

$100

Jia Li (Leo)

Oxford F DRIE

$45

$33.3

0.5

4

$54

$40

$135

$100

Clean room staff

Oxford Cl RIE

$45

$33.3

0.5

4

$54

$40

$135

$100

Clean room staff

Oxford PECVD

$50

$33.3

0.5

4

$60

$40

$150

$100

Christine McGinn

Parylene Coating

$17

$33.3

0.5

3

$20.4

$40

$51

$100

Christopher Choi

Suss MA6 Mask Aligner

$28

$33.3

0.5

4

$33.6

$40

$84

$100

Gaurang Ravindra Bhatt

Suss DUV MA6 Mask Aligner

$33

$33.3

0.5

4

$39.6

$40

$99

$100

Samantha P. Roberts

Gaurang Ravindra Bhatt

Westbond Aluminum Wire Bonder

$22

$33.3

0.5

4

$26.4

$40

$66

$100

Baichang Li

Westbond Gold Wire Bonder

$28

$33.3

0.5

4

$33.6

$40

$84

$100

Baichang Li

Disco Dicing Saw

$22

$33.3

0.5

6

$26.4

$40

$66

$100

Oscar Adrian Jimenez Gordillo

Wyko NT9100 Optical Profiler

$22

$33.3

0.5

3

$26.4

$40

$66

$100

Boyan Penkov

Chemical Mechanical Polishing

$55

$33.3

1

6

$66

$40

$165

$100

Ipshita Datta

William Xingchen Ji

Expertech LPCVD Furnace

$60

$33.3

1

10

$72

$40

$180

$100

Samantha P. Roberts

 

All prices are in USD. Previously "set up charges" are now incorporated into the hourly price starting June 1st 2017.

Rates are effective as of September 1, 2017 for Columbia Facilities users and are subject to change. Please note that not all tools located in the new clean room are available to use. Internal Columbia University users which will use grants which ran through CNI to pay the user fees will get a 10% subsidy on top of internal rates.