EQUIPMENT RATES AND SUPERUSERS


Equipment

Local Hourly Rate

Local Staff Time

Min Hours

Max Hours

Other Academic
Rate

Other Academic Staff Time Rate

External Rate

External Staff Time Rate

Superuser

Angstrom Metals Deposition System

$35

$40

0.5

4

$42

$48

$105

$120

Joshua R. Swann

Boyan Ivanov Penkov

Angstrom High Vacuum Evaporator

$40

$40

0.5

4

$42

$48

$120

$120

Joshua R. Swann

Boyan Ivanov Penkov

AJA Sputter Metal Deposition System

$22

$40

0.5

4

$26.4

$48

$66

$120

Christine McGinn

AJA Sputter Dielectric Deposition System

$25

$40

0.5

4

$30

$48

$75

$120

Christine McGinn

Wet benches

$17

$40

0.5

3

$20.4

$48

$51

$120

Clean room Staff

Bal-Tec Critical Point Dryer

$17

$40

0.5

3

$20.4

$48

$51

$120

Melody Gonzalez

Beamer

$25

$40

0.5

8

$30

$48

$75

$120

Brian Lee

KLA D-600 Profilometer

$17

$40

0.5

2

$20.4

$48

$51

$120

Kevin Kam

Cambridge NanoTech ALD

$33

$40

0.5

4

$39.6

$48

$99

$120

Clean room Staff

Diener Plasma Etch

$33

$40

0.5

4

$39.6

$48

$99

$120

Clean room Staff

Anatech Plasma Asher

$33

$40

0.5

4

$39.6

$48

$99

$120

Clean room Staff

Edwards Thermal Evaporator

$20

$40

0.5

4

$24

$48

$51

$120

Clean room Staff

Heidelberg (3um) Laser Writer

$28

$40

0.5

8

$33.6

$48

$84

$120

Gaurang Ravindra Bhatt

Heidelberg DWL 66+ Laser Writer

$33

$40

0.5

10

$39.6

$48

$99

$120

Gaurang Ravindra Bhatt

Litho Hoods (Spinners)

$17

$40

0.5

3

$20.4

$48

$51

$120

Clean room staff

Litho dirty spin station

15

$40

0.5

3

18

$48

$45

$120

Clean room staff

Nanobeam nB4

$55

$40

0.25

8

$66

$48

$165

$120

Abhinandan Antony

En-Min Shih

FEI Nova Nano SEM and NPGS e beam writing

$28

$40

0.5

8

$33.6

$48

$84

$120

Shaowen Chen

Oxford ICP RIE

$40

$40

0.5

4

$48

$48

$120

$120

Yihang Zeng

Oxford F DRIE

$45

$40

0.5

4

$54

$48

$135

$120

Mateus Corato Zanarella

Oxford Cl RIE

$45

$40

0.5

4

$54

$48

$135

$120

Mateus Corato Zanarella

Oxford PECVD

$50

$40

0.5

4

$60

$48

$150

$120

Christine McGinn

Parylene Coating

$17

$40

0.5

4

$20.4

$48

$51

$120

Kevin Kam

Suss MA6 Mask Aligner

$28

$40

0.5

4

$33.6

$48

$84

$120

Gaurang Ravindra Bhatt

Suss DUV MA6 Mask Aligner

$33

$40

0.5

4

$39.6

$48

$99

$120

Gaurang Ravindra Bhatt

Westbond Aluminum Wire Bonder

$22

$40

0.5

4

$26.4

$48

$66

$120

George Spyropoulos

Westbond Gold Wire Bonder

$28

$40

0.5

4

$33.6

$48

$84

$120

George Spyropoulos

Disco Dicing Saw

$22

$40

0.5

6

$26.4

$48

$66

$120

Oscar Adrian Jimenez Gordillo

Wyko NT9100 Optical Profiler

$22

$40

0.5

3

$26.4

$48

$66

$120

Boyan Penkov

Chemical Mechanical Polishing

$55

$40

1

6

$66

$48

$165

$120

Ipshita Datta

Brian Lee

Expertech LPCVD Furnace

$60

$40

1

10

$72

$48

$180

$120

William Xingchen Ji

 

All prices are in USD. Rates are effective as of August 1, 2019 for Columbia Facilities users and are subject to change. Please note that not all tools located in the new clean room are available to use. Internal Columbia University users who will use CNI designated grants to pay the user fees will get a 10% subsidy on top of internal rates. Please contact staff for information on user capping.